Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies

A regression-based technique is presented which distinguishes the dielectric loss from the resistive loss of high density planar capacitors in a very wide bandwidth of 0.1-8 GHz. Moreover, the procedure yields useful results if the capacitor deviates from a lumped element model and indicates when the used approximations break down or whether size-dependent loss mechanisms exist.