Measurement Method for Micro-cavity Based on Super-resolution Restoration

One effective measurement method for micro-cavity is optical fiber micro-force contact measurement method, but the measurement precision descends because of collected blur images caused by many factors. In the paper, a method used in micro-cavity measurement based on maximum a posterior (MAP) and projection onto convex set (POCS) hybrid processing is proposed. The hybrid method dual- purposes the merit of MAP convergence and POCS edge maintenance ability, adds one convex set for every part of the image under the terms of the whole image optimum. What s more, the method can reduce the noise s effect, insure the uniqueness for optimum image, and maintain the edge information. The experiment shows that the method can be used in micro-cavity measurement, and the uncertainty of location can be improved three folds.