Title :
Commercialization of a silicon nitride co-fire through (SINCOFT) process for manufacturing high efficiency mono-crystalline silicon solar cells
Author :
Kumar, Bikash ; Koval, Tim ; Narayanan, Srinivasamohan ; Shea, Stephen
Abstract :
Commercial mono-crystalline cell technology is generally based on either a buried-contact solar cell process or a screen-printed technology with or without a titanium dioxide or silicon dioxide passivating layer. Several PV companies have commercialized PECVD silicon nitride fire through processes to manufacture high efficiency multicrystalline solar cells. Less work has been reported on the development of silicon nitride processes for mono crystalline solar cells. In this paper, the development and commercialization of the silicon nitride co-fire through (SINCOFT) process for manufacturing high efficiency mono crystalline solar cells are reported. Efficiency enhancements and the production of modules with higher power density are discussed.
Keywords :
elemental semiconductors; modules; passivation; semiconductor device manufacture; silicon; silicon compounds; solar cells; 10 MW; PECVD silicon nitride fire through processes; SINCOFT; Si-SiN; efficiency enhancements; high efficiency mono-crystalline silicon solar cells; higher power density; modules; silicon nitride co-fire through process; Commercialization; Crystallization; Fires; MONOS devices; Manufacturing processes; Photovoltaic cells; Production; Pulp manufacturing; Silicon compounds; Titanium;
Conference_Titel :
Photovoltaic Specialists Conference, 2002. Conference Record of the Twenty-Ninth IEEE
Print_ISBN :
0-7803-7471-1
DOI :
10.1109/PVSC.2002.1190511