• DocumentCode
    3342173
  • Title

    A view to recent developments in thermoelectric sensors

  • Author

    Fettig, R.

  • Author_Institution
    Inst. fur Angewandte Phys., Karlsruhe Univ., Germany
  • fYear
    1996
  • fDate
    26-29 March 1996
  • Firstpage
    315
  • Lastpage
    320
  • Abstract
    Different types of thermoelectric radiation detectors are presented, as well as sensors like AC-power sensors, and gas pressure sensors. The suitability of thermoelectric radiation detectors for different applications is discussed and compared to photon detectors and other thermal detectors. In a systematic order, the characteristics of different device production techniques, of different thin thermoelectric films, and of different devices are listed, and their potential for further developments is discussed. The combination of thermoelectric materials and CMOS technology gave, and gives exciting new impulses to the field. For that reason, this subject is a dominant part of the paper.
  • Keywords
    electric sensing devices; particle detectors; pressure sensors; thermoelectric devices; thin film devices; AC-power sensors; CMOS technology; device production techniques; gas pressure sensors; photon detectors; thermal detectors; thermoelectric radiation detectors; thermoelectric sensors; thin thermoelectric films; Bolometers; Gas detectors; Infrared detectors; Optoelectronic and photonic sensors; Radiation detectors; Sensor phenomena and characterization; Temperature sensors; Thermal sensors; Thermoelectricity; Thin film sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Thermoelectrics, 1996., Fifteenth International Conference on
  • Conference_Location
    Pasadena, CA, USA
  • Print_ISBN
    0-7803-3221-0
  • Type

    conf

  • DOI
    10.1109/ICT.1996.553499
  • Filename
    553499