DocumentCode
3342173
Title
A view to recent developments in thermoelectric sensors
Author
Fettig, R.
Author_Institution
Inst. fur Angewandte Phys., Karlsruhe Univ., Germany
fYear
1996
fDate
26-29 March 1996
Firstpage
315
Lastpage
320
Abstract
Different types of thermoelectric radiation detectors are presented, as well as sensors like AC-power sensors, and gas pressure sensors. The suitability of thermoelectric radiation detectors for different applications is discussed and compared to photon detectors and other thermal detectors. In a systematic order, the characteristics of different device production techniques, of different thin thermoelectric films, and of different devices are listed, and their potential for further developments is discussed. The combination of thermoelectric materials and CMOS technology gave, and gives exciting new impulses to the field. For that reason, this subject is a dominant part of the paper.
Keywords
electric sensing devices; particle detectors; pressure sensors; thermoelectric devices; thin film devices; AC-power sensors; CMOS technology; device production techniques; gas pressure sensors; photon detectors; thermal detectors; thermoelectric radiation detectors; thermoelectric sensors; thin thermoelectric films; Bolometers; Gas detectors; Infrared detectors; Optoelectronic and photonic sensors; Radiation detectors; Sensor phenomena and characterization; Temperature sensors; Thermal sensors; Thermoelectricity; Thin film sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Thermoelectrics, 1996., Fifteenth International Conference on
Conference_Location
Pasadena, CA, USA
Print_ISBN
0-7803-3221-0
Type
conf
DOI
10.1109/ICT.1996.553499
Filename
553499
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