Title :
Advances in continuous, in-line processing of stable CdS/CdTe devices
Author :
Barth, Kurt L. ; Enzenroth, R.A. ; Sampath, W.S.
Author_Institution :
Mater. Eng. Lab., Colorado State Univ., Fort Collins, CO, USA
Abstract :
A continuous, in-line process suitable for large volume manufacturing of CdS/CdTe photovoltaic (PV) devices has been demonstrated at the pilot scale level. The pilot scale system incorporates the steps of glass heating, all semiconductor depositions, chloride heat treatment and ohmic contact formation in one chamber operating at modest vacuum. The cycle time is 2 minutes. The process is scaleable, uniform and reproducible. Utilizing this process, devices with efficiencies greater than 12% (verified at NREL) are repeatedly fabricated on unmodified Pilkington TEC 15 substrates without anti-reflection coatings. The stability of the devices is very promising. Many devices are being tested outdoors for stability. Outdoor results are compared to indoor stress testing. Detailed analyses of the novel copper based ohmic contact using X-ray photoelectron spectroscopy (XPS) and glancing angle X-ray diffraction (GAXRD) are presented.
Keywords :
II-VI semiconductors; X-ray diffraction; X-ray photoelectron spectra; cadmium compounds; environmental testing; heat treatment; life testing; ohmic contacts; semiconductor device manufacture; semiconductor device testing; semiconductor growth; solar cells; 12 percent; 2 min; CdS-CdTe; CdS/CdTe photovoltaic devices; X-ray photoelectron spectroscopy; chloride heat treatment; continuous in-line processing; copper based ohmic contact; cycle time; efficiencies; glancing angle X-ray diffraction; glass heating; indoor stress testing; large volume manufacturing; modest vacuum; ohmic contact formation; one chamber; outdoor testing; pilot scale level; scaleable uniform reproducible process; semiconductor depositions; stability; stable CdS/CdTe devices; unmodified Pilkington TEC 15 substrates; Glass; Heat treatment; Manufacturing processes; Ohmic contacts; Photovoltaic systems; Semiconductor device manufacture; Solar power generation; Stability; Testing; Vacuum systems;
Conference_Titel :
Photovoltaic Specialists Conference, 2002. Conference Record of the Twenty-Ninth IEEE
Print_ISBN :
0-7803-7471-1
DOI :
10.1109/PVSC.2002.1190624