Title :
Advanced controllers for microelectromechanical actuators
Author :
Dean, Robert N., Jr. ; Hung, John Y. ; Wilamowski, Bogdan M.
Author_Institution :
Dept. of Electr. & Comput. Eng., Auburn, AL
Abstract :
We survey the recent methods for improving position control of electrostatic microelectromechanical (MEMS) actuators, and present recent new nonlinear approaches being studied in our electronic packaging and control systems laboratories. The new methods include a type of variable structure control (switching, but not sliding mode) and two methods for feedback linearizing control
Keywords :
electrostatic actuators; feedback; linearisation techniques; nonlinear control systems; position control; variable structure systems; control systems laboratories; electronic packaging; electrostatic microelectromechanical actuators; feedback linearizing control; nonlinear approach; position control; variable structure control; Control systems; Electric variables control; Electronics packaging; Electrostatic actuators; Laboratories; Linear feedback control systems; Micromechanical devices; Nonlinear control systems; Position control; Sliding mode control;
Conference_Titel :
Industrial Technology, 2005. ICIT 2005. IEEE International Conference on
Conference_Location :
Hong Kong
Print_ISBN :
0-7803-9484-4
DOI :
10.1109/ICIT.2005.1600763
