• DocumentCode
    3344065
  • Title

    Growth ignetics of thick InP layers

  • Author

    Srobar, F. ; Prochazkova, O.

  • fYear
    2004
  • fDate
    17-21 Oct. 2004
  • Firstpage
    65
  • Lastpage
    68
  • Abstract
    Applicability of the Burton-Cabrera-Frank model in the case of LPE growth of semiconductor compounds is limited due to restrictions imposed by the volume diffusion of constituent units through the melt. We model this phenomenon by introducing a growth rate dependent correction to the supersaturation. Relation between growth rate and supersaturation is then no longer explicit and can be solved using so-called causal diagrams. This technique also affords additional insights into the physics of the ´growth process. In particular, it reveals the presence of negative feedback and provides means to describe its junction in precise manner. Theoretical predictions are confronted with our experimental data on the growth of thick InP and InP:Nd layers.
  • Keywords
    Couplings; Differential equations; Feedback loop; Indium phosphide; Monitoring; Neodymium; Nonlinear equations; Optical microscopy; Temperature; Tin;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. The Fifth International Conference on
  • Conference_Location
    Smolenice Castle, Slovakia
  • Print_ISBN
    0-7803-8335-7
  • Type

    conf

  • DOI
    10.1109/ASDAM.2004.1441159
  • Filename
    1441159