Research on a two-dimension micromanipulator utilizing flexure hinges

The paper analyzes a four-bar parallel micromanipulator and a double four-bar parallel micromanipulator, uses the merits of two micromanipulators and wipes off their demerits to develop a compound four-bar parallel micromanipulator, the theoretical analysis and finite element simulation proves this proposed micromanipulator to be a little concentrated stress and little parasitic displacement error one. In the end, a two-dimension micromanipulator is manufactured, and the characteristics of input and output are studied, the experiment results show that the compound four-bar two-dimension micromanipulator has good performance