Title :
Characterization of high-resistivity polycrystalline silicon substrates for wafer-level packaging and integration of RF passives
Author :
Bartek, M. ; Polyakov, A. ; Sinaga, S.M. ; Mendes, P.M. ; Correia, J.H. ; Burghartz, J.N.
Keywords :
Active inductors; Circuits; Coplanar waveguides; Dielectric substrates; Glass; Radio frequency; Silicon; Spirals; Thermal conductivity; Wafer scale integration;
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. The Fifth International Conference on
Print_ISBN :
0-7803-8335-7
DOI :
10.1109/ASDAM.2004.1441202
