DocumentCode
3345150
Title
Micro-mechanical characterisation for MEMS thin films by bending μ-machined cantilevers
Author
He, J.H. ; Moore, D.F. ; Taylor, H. ; Boutchich, M. ; Boyle, P. ; McShane, G. ; Hopcroft, M. ; Luo, J.K.
fYear
2004
fDate
Oct. 17-21, 2004
Firstpage
287
Lastpage
290
Keywords
Dry etching; Laser beam cutting; Laser beams; Micromechanical devices; Optical design; Ovens; Silicon compounds; Structural beams; Thickness measurement; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. The Fifth International Conference on
Print_ISBN
0-7803-8335-7
Type
conf
DOI
10.1109/ASDAM.2004.1441217
Filename
1441217
Link To Document