DocumentCode :
3345150
Title :
Micro-mechanical characterisation for MEMS thin films by bending μ-machined cantilevers
Author :
He, J.H. ; Moore, D.F. ; Taylor, H. ; Boutchich, M. ; Boyle, P. ; McShane, G. ; Hopcroft, M. ; Luo, J.K.
fYear :
2004
fDate :
Oct. 17-21, 2004
Firstpage :
287
Lastpage :
290
Keywords :
Dry etching; Laser beam cutting; Laser beams; Micromechanical devices; Optical design; Ovens; Silicon compounds; Structural beams; Thickness measurement; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. The Fifth International Conference on
Print_ISBN :
0-7803-8335-7
Type :
conf
DOI :
10.1109/ASDAM.2004.1441217
Filename :
1441217
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3345150
