Integrated pressure sensor - use of microsystems model flow

The paper describes flow of design software of a simple microsysfem structure for a capacity measurement. The base of structure is capacity pressure circlIi! with integrated inductance on a single Si chip. An integrated one-chip passive microsensor as resonance circuit has been designed and realised The maximum size of the whole integrated circuit can be 3x3 mm. The capacitor area of Ixl mm is chosen. Model system with corresponding software support is utilized jar design. Tools used for the design of integrated structure are described as well. Different models were designed for simulation of the properties of the designed structure. Model of the substitute electronic circuit involves active and parasitic elements. The properties of this eqUivalent model are explored using the SPICE circuit simulator. Mechanical properties of the structure are explored using the CoventorWare program. Distribution of mechanical stress and boundary parameters are the most important ones. Various modifications of integrated structure are designed ond realised.