DocumentCode :
3345662
Title :
AlGaAs Photonic Integrated Circuits Fabricated Using Chemically Assisted Ion Beam Etching
Author :
Grande, W.J. ; Johnson, John E. ; Tang, C.L.
Author_Institution :
Cornell University
fYear :
1990
fDate :
4-9 Nov 1990
Firstpage :
337
Lastpage :
338
Keywords :
Chemicals; Dry etching; Ion beams; Laboratories; Optical devices; Optical waveguides; Photodetectors; Photonic integrated circuits; Power lasers; Waveguide lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
Print_ISBN :
0-87942-550-4
Type :
conf
DOI :
10.1109/LEOS.1990.690599
Filename :
690599
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3345662
بازگشت