• DocumentCode
    3345662
  • Title

    AlGaAs Photonic Integrated Circuits Fabricated Using Chemically Assisted Ion Beam Etching

  • Author

    Grande, W.J. ; Johnson, John E. ; Tang, C.L.

  • Author_Institution
    Cornell University
  • fYear
    1990
  • fDate
    4-9 Nov 1990
  • Firstpage
    337
  • Lastpage
    338
  • Keywords
    Chemicals; Dry etching; Ion beams; Laboratories; Optical devices; Optical waveguides; Photodetectors; Photonic integrated circuits; Power lasers; Waveguide lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
  • Print_ISBN
    0-87942-550-4
  • Type

    conf

  • DOI
    10.1109/LEOS.1990.690599
  • Filename
    690599
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3345662