A large travel piezoelectric motor nanopositioning system

Author

Xu Congyu ; Yu Xiaofen ; Zhang Weifu

Author_Institution

Sch. of Instrum. Sci. & Opto-Electron. Eng., Hefei Univ. of Technol., Hefei, China

fYear

2010

fDate

26-28 June 2010

Firstpage

3615

Lastpage

3618

Abstract

A small-sized and large travel nanopositioning system was presented, the actuation characteristic of a piezoelectric motor with multi-claws was analyzed and tested. Considering the influence on nanopositioning of strike force caused by the piezoelectric motor´s claws touching the ceramic rod of rotor or reaction force caused by the piezoelectric motor´s claws returning with inertia to original point, a smoothing actuation algorithm with one of varied stepping distance actuation zone and one of actuation mode converting point was studied, by which the big positioning disturbance caused by strike force and reaction force were avoided, therefore the large travel actuation velocity of 0~1mm/s and 1nm positioning resolution with no overshoot were well met.

Keywords

nanopositioning; piezoelectric motors; smoothing methods; actuation characteristics; ceramic rod; piezoelectric motor nanopositioning system; positioning disturbance; reaction force; rotors; smoothing actuation algorithm; travel actuation velocity; Ceramics; Displacement measurement; Frequency; Gratings; Micromotors; Nanopositioning; Permanent magnet motors; Synchronous motors; Testing; Velocity measurement; Control algorithm; Nanopositioning; Piezoelectric motor;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechanic Automation and Control Engineering (MACE), 2010 International Conference on

Conference_Location

Wuhan

Print_ISBN

978-1-4244-7737-1

Type

conf

DOI

10.1109/MACE.2010.5535515

Filename

5535515