Title :
Optimization of double-side 3D detector technology for first productions at FBK
Author :
Vianello, Elisa ; Bagolini, Alvise ; Bellutti, Pierluigi ; Boscardin, Maurizio ; Betta, Gian-Franco Dalla ; Giacomini, Gabriele ; Piemonte, Claudio ; Povoli, Marco ; Zorzi, Nicola
Author_Institution :
Centro per i Mater. e i Microsistemi, Fondazione Bruno Kessler, Povo diTrento, Italy
Abstract :
We report on the optimization of the technology aimed at the production of Double-Sided, Double-Column 3D detectors with full passing columns (3D-DTTC) at FBK (Trento, Italy). This R&D project is aimed at establishing a suitable technology for the production of 3D pixel sensors to be installed into the ATLAS IBL. We describe the main process modifications adopted on more recent 3D batches, to overcome the limitations affecting the first 3D batch, as arisen from its electrical characterization.
Keywords :
electrodes; silicon radiation detectors; 3D pixel sensors; 3D-DTTC; ATLAS IBL; FBK; double column 3D detectors; double side 3D detector technology optimization; double sided 3D detectors; passing columns; Continuous wavelet transforms; Electric breakdown; Three dimensional displays;
Conference_Titel :
Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC), 2011 IEEE
Conference_Location :
Valencia
Print_ISBN :
978-1-4673-0118-3
DOI :
10.1109/NSSMIC.2011.6154102
