A MEMS resonator-type viscosity sensor based on triangular cantilever

A MEMS (Micro Electro-mechanical System) resonator-type viscosity sensor with range from 0 to 1 mPa·s was presented with good frequency response and high sensitivity. Its sensitive chip with a triangular cantilever structure was investigated. This paper studied the operating principle of the MEMS resonator-type viscosity sensor. The natural frequency of the sensitive chip was deduced with its structure size in theory, which was validated with ANSYS finite element software. The modal analysis and harmonic response analysis for the sensitive chip with triangular cantilever structure were performed to determine the resonant mode of the MEMS viscosity sensor. Finally, the layout and fabrication processes of the sensitive chip of the MEMS resonator-type viscosity sensor were designed and studied. The sensitive chip with small size, high sensitivity and high temperature resistance was fabricated with MEMS technology on SOI (Silicon on Insulator) monocrystalline in order to achieve real-time on-line measurement of fluid viscosity.