Design and analysis of A 3-DOF micromanipulator driven by piezoelectric actuators

Based on 3-RRRRR parallel mechanism, a novel 3-DOF micromanipulator which is driven by piezoelectric actuators has been put forward. From the aspect of micromanipulator, spatial parallel mechanism possesses the advantages of high stiffness, compact structure and so on, and overcomes the disadvantage of small workspace. All the flexible hinges of the 3-RRRRR parallel mechanism are revolute pairs, so it is easy to be machininged and has high precision. In this paper, the static stiffness analysis of the micromanipulator is given. The dimension of the platforms and flexible hinges and the arrangement of the chains are designed. The PZT and the material of the flexure mechanism are chosen. The safety check of the flexure mechanism is done. The merits of parallel mechanism and piezoelectric actuators are reflected in the mechanism.