Title :
Application of hydrothermal mechanism for tailor-making perovskite titanate films
Author :
Xu, W. Ping ; Zheng, Lirong ; Xin, Huoping ; Okuyama, Masanori ; Lin, Chenglu
Author_Institution :
Inst. of Metall., Acad. Sinica, Shanghai, China
Abstract :
In this paper, the hydrothermal preparation mechanism for BaTiO 3 films formed on Ti-covered silicon substrates was successfully applied to the preparation of other titanate films. As the result, (110)-oriented BaTiO3 films and epitaxial PbTiO3 films were hydrothermally grown on TiO2/Si and SrTiO 3 substrates, respectively. Finally, a method combining the hydrothermal process with sol-gel method was positively recommended and realized in the synthesis of perovskite PZT(52/48) films
Keywords :
barium compounds; ceramics; ferroelectric materials; ferroelectric thin films; lead compounds; liquid phase epitaxial growth; sol-gel processing; (110)-oriented BaTiO3 films; BaTiO3; BaTiO3 films; PZT; PbTiO3; PbZrO3TiO3; Si; SrTiO3; SrTiO3 substrates; Ti; Ti-covered silicon substrates; TiO2; TiO2/Si substrates; epitaxial PbTiO3 films; hydrothermal mechanism; mild hydrothermal route; perovskite ABO3 films; perovskite PZT(52/48) films; perovskite titanate films; sol-gel method; solid-state synthesis; Chemistry; Ferroelectric films; Ferroelectric materials; Semiconductor films; Semiconductor thin films; Silicon; Solid state circuits; Substrates; Temperature; Titanium compounds;
Conference_Titel :
Electrets, 1996. (ISE 9), 9th International Symposium on
Conference_Location :
Shanghai
Print_ISBN :
0-7803-2695-4
DOI :
10.1109/ISE.1996.578177
