Three-dimensional silicon photonic crystals

Summary form only given. A three-dimensional (3D) photonic crystal is an optical analog of a semiconductor that is useful for controlling and manipulating the flow of light on a semiconductor chip. The realization of high efficiency sub-/spl mu/A edge-emitting-lasers, high speed tera-hertz optical switches and the routing of optical signal in all three-dimensions are but a few benefits of 3D photonic crystals. We report the realization of a series of silicon 3D photonic crystals operating in the IR, mid-IR, and most importantly the near-IR. The structure maintains its crystal symmetry throughout the entire 6-inches wafer and holds a complete photonic bandgap.