Effect of UV irradiation on gas sensing behavior of nanocrystalline ZnO thin films

Author

Soleimanpour, A.M. ; Jayatissa, A.H.

Author_Institution

Ind. & Manuf. Eng. Dept., Univ. of Toledo, Toledo, OH, USA

fYear

2010

fDate

12-15 Oct. 2010

Firstpage

225

Lastpage

229

Abstract

The effect of UV irradiation on ZnO thin film based gas sensor was investigated. Zinc oxide thin films were deposited on an alkali free glass substrate by magnetron sputtering system using zinc target. The UV irradiation of the ZnO thin films was measured to understand the change of microstructure, electrical properties, optical properties and gas sensing characteristics. The X-ray diffraction patterns and SEM images revealed that the films have a nanocrystalline structure. The optical properties of ZnO films were not affected by the UV irradiation significantly. The gas sensing behavior of zinc oxide thin films were enhanced by UV irradiation for a shorter period whereas sensing characteristics were degraded for a longer irradiation period. It was also observed that the dependence of gas sensing characteristics was correlated with the change of electrical properties and crystallinity of films.

Keywords

II-VI semiconductors; X-ray diffraction; gas sensors; nanostructured materials; scanning electron microscopy; semiconductor thin films; sputter deposition; thin film sensors; ultraviolet radiation effects; wide band gap semiconductors; zinc compounds; SEM image; SiO₂; UV irradiation; X-ray diffraction pattern; ZnO; alkali free glass substrate; gas sensor; magnetron sputtering; nanocrystalline zinc oxide thin film; zinc target; Films; Gas detectors; Radiation effects; Temperature measurement; Temperature sensors; Zinc oxide; UV irradiation; XRD; Zinc oxide; gas sensing; gas sensor; sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology Materials and Devices Conference (NMDC), 2010 IEEE

Conference_Location

Monterey, CA

Print_ISBN

978-1-4244-8896-4

Type

conf

DOI

10.1109/NMDC.2010.5652439

Filename

5652439