Title :
Sensitivity Theory Application in MEMS Design
Author :
Teslyuk, V. ; Lobur, M. ; Zaharyuk, R. ; Tarik, Al Omari
Abstract :
In this paper the application of the sensitivity theory is proposed as a tool to increase computer aided design quality.
Keywords :
CAD; capacitive sensors; microsensors; MEMS; capacitive sensor; computer aided design; sensitivity theory; Application software; Batch production systems; Costs; Design automation; Electrical engineering; Microelectromechanical devices; Microelectronics; Micromechanical devices; Nonlinear optics; Optical sensors; CAD; MEMC; sensitivity theory;
Conference_Titel :
CAD Systems in Microelectronics, 2007. CADSM '07. 9th International Conference - The Experience of Designing and Applications of
Conference_Location :
Lviv-Polyana
Print_ISBN :
966-533-587-0
DOI :
10.1109/CADSM.2007.4297642
