Title :
A Computer Aided Analysis of a Capacitive Accelerometer Parameters
Author :
Teslyuk, Vasyl ; Kushnir, Yuri ; Zaharyuk, Roman ; Pereyma, Mykola
Abstract :
In this paper a model of a capacitive accelerometer is proposed. The integrated environment for engineering simulation ANSYS was used. The paper performs the results obtained by the system and assesses their adequacy in comparison with approximately expected data.
Keywords :
accelerometers; capacitive sensors; computer aided analysis; electronic engineering computing; microsensors; ANSYS engineering simulation environment; MEMS; capacitive accelerometer; computer aided analysis; integrated environment; microaccelerometer; Accelerometers; Actuators; Capacitance; Capacitors; Computer aided analysis; Costs; Fingers; Mechanical sensors; Stress; Thermal sensors; ANSYS; MEMS; capacitance shift; nonlinearity; sensor;
Conference_Titel :
CAD Systems in Microelectronics, 2007. CADSM '07. 9th International Conference - The Experience of Designing and Applications of
Conference_Location :
Lviv-Polyana
Print_ISBN :
966-533-587-0
DOI :
10.1109/CADSM.2007.4297649
