Title :
Tutorial for computer aided diagnostic E-beam testing of ASIC´s
Author :
Sartore, Richard G. ; Shastry, N. ; Brahme, Upendra ; Jefferson, Kevin ; Halaviati, Ramin
Author_Institution :
US Army Lab. Command, SLCET-RR, Port Monmouth, NJ, USA
Abstract :
This tutorial reviews the basic instrumentation and tools needed to perform e-beam testing, namely, the scanning electron microscope, e-beam tester electronics, stimuli source electronics, and CAD databases. The integration of CAD information with measurement electronics is discussed as a necessary aid in performing diagnostics on ASIC devices. The viewpoint is from a user´s standpoint with emphasis on practical aspects of successful e-beam testing on microelectronic devices
Keywords :
application specific integrated circuits; automatic test equipment; automatic testing; electron beam testing; integrated circuit testing; ASIC devices; CAD databases; diagnostic E-beam testing; e-beam tester electronics; instrumentation; microelectronic devices; practical aspects; scanning electron microscope; stimuli source electronics; tutorial;
Conference_Titel :
ASIC Conference and Exhibit, 1991. Proceedings., Fourth Annual IEEE International
Conference_Location :
Rochester, NY
Print_ISBN :
0-7803-0101-3
DOI :
10.1109/ASIC.1991.242936
