DocumentCode
3350952
Title
Investigation of the humidity sensitivity in Fe3O4 thin films using porous ZrO2 ceramics as carriers
Author
Li, XinShan ; Zhang, Jiancheng ; Meng, Zhongyan
Author_Institution
Sch. of Mater. Sci. & Technol., Shanghai Univ., China
fYear
1996
fDate
25-30 Sep 1996
Firstpage
647
Lastpage
649
Abstract
Porous ZrO2 ceramics have been prepared by sol-gel process. The porous ZrO2 ceramics were used as carriers, and the thin films of the typical humidity material Fe3O4 system were deposited on the inner surfaces of the pores via sol-gel technique. The thin films were treated at 250°C for 1 hr. It is found that the resistivity of the sample is decreased by four orders of magnitude when the humidity changes from 0%RH to 100%RH and has a rapid response time, which is about 1 s. The micrographs of the samples were observed by SEM
Keywords
ceramics; electric sensing devices; electrical resistivity; heat treatment; humidity sensors; iron compounds; porous materials; scanning electron microscopy; sintering; sol-gel processing; zirconium compounds; 1 h; 250 C; Fe3O4 thin films; SEM; ZrO2-Fe3O4; humidity sensitivity; inner surfaces; micrographs; porous ZrO2 ceramics; rapid response time; resistivity; sol-gel process; thin films; Atmosphere; Ceramics; Humidity; Polymers; Rough surfaces; Scanning electron microscopy; Surface roughness; Temperature dependence; Temperature distribution; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrets, 1996. (ISE 9), 9th International Symposium on
Conference_Location
Shanghai
Print_ISBN
0-7803-2695-4
Type
conf
DOI
10.1109/ISE.1996.578184
Filename
578184
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