DocumentCode
3350970
Title
Full Wafer Technology For Semiconductor Lasers
Author
Buchniann, P. ; Benedict, M. ; Bona, G.L. ; Cahoon, N. ; Dätwyler, K. ; Dietrich, H.P. ; Moser, A. ; Seitz, H. ; Vettiger, P. ; Vocgeli, O. ; Webb, D. ; Wolf, P.
Author_Institution
IBM Research Division
fYear
1990
fDate
4-9 Nov 1990
Firstpage
486
Lastpage
489
Keywords
Etching; Ion beams; Ion sources; Mirrors; Optical device fabrication; Power generation; Power lasers; Ring lasers; Semiconductor lasers; Waveguide lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
Print_ISBN
0-87942-550-4
Type
conf
DOI
10.1109/LEOS.1990.690651
Filename
690651
Link To Document