Biomedical applications of MEMS

Exploiting the materials and processing techniques developed for integrated circuits, silicon micromachining technology has been responsible for fundamental improvements in many, diverse fields of biomedicine. This paper reviews current state-of-the-art biomedical applications of micromachining technology such as pressure sensors and biochemical sensors. In addition, we discuss significant new biomedical innovations on the horizon which make use of micromachining techniques and processes.