Design, fabrication, and testing of a piezoelectrically driven high flow rate micro-pump

Author

Saggere, L. ; Hagood, N.W. ; Roberts, D.C. ; Li, H.Q. ; Steyn, J.L. ; Turner, K. ; Carretero, J.A. ; Yaglioglu, O. ; Su, Y.-H. ; Mlcak, R. ; Spearing, S.M. ; Breuer, K.S. ; Schmidt, M.A.

Author_Institution

Massachusetts Inst. of Technol., Cambridge, MA, USA

Volume

1

fYear

2000

fDate

2000

Firstpage

297

Abstract

Towards the development of novel class of miniature transducers with very high specific power, a high frequency and high flow rate hydraulic micro-pump with passive check valves was fabricated and tested. The micro-pump features a small piezoelectric (PZT-5H/PZN-PT) cylinder integrated into micromachined silicon and pyrex chips. The piezoelectric cylinder bonded to a thick circular disk serves as the drive element in the pump chamber, and two axisymmetric silicon membranes with hollow annular bosses serve as system check valves. Using silicone oil as the working fluid, the performance of the micro-pump was tested by varying voltages from 0 to 1600 V and frequencies from 1 kHz to 12 kHz. The micro-pump with PZT-5H element achieved a high flow rate of 2.5 ml/min at 1200 V and 4.5 kHz

Keywords

lead compounds; micropumps; piezoelectric transducers; 0 to 1600 V; 1 to 12 kHz; PZN-PT; PZT; PZT-5H; PbZnO₃NbO₃-PbTiO₃; PbZrO3TiO3; axisymmetric silicon membrane; circular disk; drive element; flow rate; hydraulic micro-pump; micro-hydraulic transducer; micromachined silicon chip; passive check valve; piezoelectric cylinder; pyrex chip; silicone oil; Bonding; Drives; Fabrication; Frequency; Micropumps; Piezoelectric transducers; Pumps; Silicon; Testing; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 2000. ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on

Conference_Location

Honolulu, HI

ISSN

1099-4734

Print_ISBN

0-7803-5940-2

Type

conf

DOI

10.1109/ISAF.2000.941559

Filename

941559