Title :
Mechanism of laser interaction with the material and its application
Author :
Li, Tianze ; Wen, Fang ; Hou, Luan ; Jiang, Chuan ; Zhang, Xia
Author_Institution :
Sch. of Electr. & Electron. Eng., Shandong Univ. of Technol., Zibo, China
Abstract :
Three kinds of theories about the interaction of laser and material are expounded. The transmission process of laser energy and the Effects of several factors including wavelength, temperature and surface coating on absorption rate are analyzed. The mathematical model and the solution method of the interaction process of laser and material are established, and the applications of laser in the semiconductor material processing with examples. Finally, several important conclusions are produced.
Keywords :
laser beam machining; mathematical analysis; semiconductor materials; absorption rate; laser interaction mechanism; laser-material interaction; semiconductor material processing; surface coating factor; temperature factor; wavelength factor; Absorption; Coatings; Laser modes; Laser theory; Optical materials; Semiconductor lasers; Semiconductor materials; Surface emitting lasers; Surface waves; Temperature; absorption rate; interaction of laser and material; material processing; mathematical model;
Conference_Titel :
Mechanic Automation and Control Engineering (MACE), 2010 International Conference on
Conference_Location :
Wuhan
Print_ISBN :
978-1-4244-7737-1
DOI :
10.1109/MACE.2010.5535811
