• DocumentCode
    3352506
  • Title

    Fabrication and Testing of Single Photon Avalanche Detectors in the TSMC 0.18μm CMOS Technology

  • Author

    Marwick, Miriam Adlerstein ; Andreou, Andreas G.

  • Author_Institution
    Johns Hopkins Univ., Baltimore
  • fYear
    2007
  • fDate
    14-16 March 2007
  • Firstpage
    741
  • Lastpage
    744
  • Abstract
    We report on the fabrication and preliminary testing of a single photon avalanche detectors (SPAD) fabricated in the TSMC 0.18μm standard CMOS technology (CM018). The detectors exhibit low dark count rate and robust geiger-mode operation at room temperature.
  • Keywords
    CMOS integrated circuits; avalanche photodiodes; photodetectors; SPAD fabrication; TSMC CMOS technology; geiger-mode operation; single photon avalanche detector; size 0.18 μm; Avalanche photodiodes; CMOS process; CMOS technology; Circuits; Detectors; Fabrication; Foundries; Optoelectronic and photonic sensors; Testing; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Information Sciences and Systems, 2007. CISS '07. 41st Annual Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    1-4244-1063-3
  • Electronic_ISBN
    1-4244-1037-1
  • Type

    conf

  • DOI
    10.1109/CISS.2007.4298405
  • Filename
    4298405
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3352506