Title :
Fabrication and Testing of Single Photon Avalanche Detectors in the TSMC 0.18μm CMOS Technology
Author :
Marwick, Miriam Adlerstein ; Andreou, Andreas G.
Author_Institution :
Johns Hopkins Univ., Baltimore
Abstract :
We report on the fabrication and preliminary testing of a single photon avalanche detectors (SPAD) fabricated in the TSMC 0.18μm standard CMOS technology (CM018). The detectors exhibit low dark count rate and robust geiger-mode operation at room temperature.
Keywords :
CMOS integrated circuits; avalanche photodiodes; photodetectors; SPAD fabrication; TSMC CMOS technology; geiger-mode operation; single photon avalanche detector; size 0.18 μm; Avalanche photodiodes; CMOS process; CMOS technology; Circuits; Detectors; Fabrication; Foundries; Optoelectronic and photonic sensors; Testing; Voltage;
Conference_Titel :
Information Sciences and Systems, 2007. CISS '07. 41st Annual Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
1-4244-1063-3
Electronic_ISBN :
1-4244-1037-1
DOI :
10.1109/CISS.2007.4298405
