Title :
Semiconductor process line scheduling expert system
Author :
Ohkura, M. ; Mizuno, K. ; Yugami, J. ; Hikichi, A. ; Nishida, T.
Author_Institution :
Central Res. Lab., Hitachi Ltd., Tokyo, Japan
Abstract :
We report a newly developed semiconductor process scheduler using an expert system, which assigns the lots to be processed to each machine at each period. This system is developed using an expert system development-supporting tool ES/PROMOTE2/W-PLAN. In contrast to line simulators such as ManSim, our system aims mainly at detailed and optimized scheduling for the next few days. Our system was successfully applied to our prototyping line and resulted in an average 10% increase in scheduled process steps compared with the existing scheduler which mainly considers the FIFO condition
Keywords :
expert systems; integrated circuit manufacture; production control; ES/PROMOTE2/W-PLAN; development-supporting tool; expert system; lot processing; optimization; prototyping line; semiconductor process line scheduling; Annealing; Cleaning; Conductors; Displays; Expert systems; Furnaces; Job shop scheduling; Oxidation; Prototypes; Workstations;
Conference_Titel :
Semiconductor Manufacturing, 1995., IEEE/UCS/SEMI International Symposium on
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-2928-7
DOI :
10.1109/ISSM.1995.524366
