Low cost and flexible data analysis system to find appropriate corrective action for yield deteriorations in LSI manufacturing

Author

Yamanaka, A. ; Mizuno, M. ; Ariyoshi, R. ; Nozawa, O.

Author_Institution

Technol. Dev. Centre, Kawasaki Steel Corp., Tochigi, Japan

fYear

1995

fDate

17-19 Sep 1995

Firstpage

103

Lastpage

106

Abstract

Shortening failure analysis TAT to find appropriate corrective action to resolve low yield problems is one of the most effective methods to improve profitability of LSE manufacturing. We have developed and are successfully using a low cost data analysis system for such purposes. Simple C-shell script programming and AWK programming were used for this development. These tools are so easy to handle that the user of the system, device engineers, were able to construct the system, which made the system friendly and easy to be modified

Keywords

data analysis; electronic engineering computing; failure analysis; integrated circuit yield; large scale integration; manufacturing data processing; AWK programming; C-shell script programming; LSI manufacturing; data analysis system; failure analysis; turn around time; yield; Costs; Data analysis; Data mining; Displays; Etching; Failure analysis; Flexible manufacturing systems; Keyboards; Semiconductor device manufacture; Software performance;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 1995., IEEE/UCS/SEMI International Symposium on

Conference_Location

Austin, TX

Print_ISBN

0-7803-2928-7

Type

conf

DOI

10.1109/ISSM.1995.524369

Filename

524369