Title :
Low cost and flexible data analysis system to find appropriate corrective action for yield deteriorations in LSI manufacturing
Author :
Yamanaka, A. ; Mizuno, M. ; Ariyoshi, R. ; Nozawa, O.
Author_Institution :
Technol. Dev. Centre, Kawasaki Steel Corp., Tochigi, Japan
Abstract :
Shortening failure analysis TAT to find appropriate corrective action to resolve low yield problems is one of the most effective methods to improve profitability of LSE manufacturing. We have developed and are successfully using a low cost data analysis system for such purposes. Simple C-shell script programming and AWK programming were used for this development. These tools are so easy to handle that the user of the system, device engineers, were able to construct the system, which made the system friendly and easy to be modified
Keywords :
data analysis; electronic engineering computing; failure analysis; integrated circuit yield; large scale integration; manufacturing data processing; AWK programming; C-shell script programming; LSI manufacturing; data analysis system; failure analysis; turn around time; yield; Costs; Data analysis; Data mining; Displays; Etching; Failure analysis; Flexible manufacturing systems; Keyboards; Semiconductor device manufacture; Software performance;
Conference_Titel :
Semiconductor Manufacturing, 1995., IEEE/UCS/SEMI International Symposium on
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-2928-7
DOI :
10.1109/ISSM.1995.524369
