• DocumentCode
    3352790
  • Title

    Processing wide-bandgap optical materials with 157-nm F2 laser radiation

  • Author

    Herman, Peter R. ; Kurosawa, K. ; Yamanishi, Tomonori ; Jackson, Brian ; Jianhao Yang

  • Author_Institution
    Department of Electrical and Computer Engineering and Ontario Laser and Lightwave Research Centre, University of Toronto
  • Volume
    11
  • fYear
    1997
  • fDate
    18-23 May 1997
  • Firstpage
    98
  • Lastpage
    98
  • Keywords
    Absorption; Gas lasers; Laser ablation; Laser beam cutting; Laser theory; Optical materials; Optical pulses; Optical surface waves; Pulsed laser deposition; Surface emitting lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
  • Conference_Location
    Baltimore, MD, USA
  • Print_ISBN
    0-7803-4125-2
  • Type

    conf

  • DOI
    10.1109/CLEO.1997.602297
  • Filename
    602297