DocumentCode
3352790
Title
Processing wide-bandgap optical materials with 157-nm F2 laser radiation
Author
Herman, Peter R. ; Kurosawa, K. ; Yamanishi, Tomonori ; Jackson, Brian ; Jianhao Yang
Author_Institution
Department of Electrical and Computer Engineering and Ontario Laser and Lightwave Research Centre, University of Toronto
Volume
11
fYear
1997
fDate
18-23 May 1997
Firstpage
98
Lastpage
98
Keywords
Absorption; Gas lasers; Laser ablation; Laser beam cutting; Laser theory; Optical materials; Optical pulses; Optical surface waves; Pulsed laser deposition; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
Conference_Location
Baltimore, MD, USA
Print_ISBN
0-7803-4125-2
Type
conf
DOI
10.1109/CLEO.1997.602297
Filename
602297
Link To Document