Title :
Particle count and analysis by using a cyclone particle sampler
Author :
Tokunaga, N. ; Okamura, S. ; Sasaki, S. ; Nakamura, S. ; Mieno, F.
Author_Institution :
Production Eng. Group, Fujitsu Ltd., Iwate, Japan
Abstract :
We performed particle composition analysis of clean room particles by using a particle analyzer (PT1000) and a Cyclone Particle Sampler. While we expected to find only small particles in the clean room, we detected many large particles as well. Many floating particles are greatly influenced by air flow current. Particles are created by human movement and we speculate that this is related to air flow. We suggest methods to improve the cleanliness of the clean room and to enhance device yield
Keywords :
atomic emission spectroscopy; clean rooms; integrated circuit manufacture; particle counting; PT1000; air flow current; clean room particles; cleanliness improvement; cyclone particle sampler; device yield enhancement; human movement; particle analyzer; particle composition analysis; particle count; Atomic measurements; Counting circuits; Cyclones; Filters; Helium; Linear predictive coding; Luminescence; Particle measurements; Plasma measurements; Time measurement;
Conference_Titel :
Semiconductor Manufacturing, 1995., IEEE/UCS/SEMI International Symposium on
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-2928-7
DOI :
10.1109/ISSM.1995.524384
