DocumentCode
3352865
Title
Particle count and analysis by using a cyclone particle sampler
Author
Tokunaga, N. ; Okamura, S. ; Sasaki, S. ; Nakamura, S. ; Mieno, F.
Author_Institution
Production Eng. Group, Fujitsu Ltd., Iwate, Japan
fYear
1995
fDate
17-19 Sep 1995
Firstpage
175
Lastpage
177
Abstract
We performed particle composition analysis of clean room particles by using a particle analyzer (PT1000) and a Cyclone Particle Sampler. While we expected to find only small particles in the clean room, we detected many large particles as well. Many floating particles are greatly influenced by air flow current. Particles are created by human movement and we speculate that this is related to air flow. We suggest methods to improve the cleanliness of the clean room and to enhance device yield
Keywords
atomic emission spectroscopy; clean rooms; integrated circuit manufacture; particle counting; PT1000; air flow current; clean room particles; cleanliness improvement; cyclone particle sampler; device yield enhancement; human movement; particle analyzer; particle composition analysis; particle count; Atomic measurements; Counting circuits; Cyclones; Filters; Helium; Linear predictive coding; Luminescence; Particle measurements; Plasma measurements; Time measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 1995., IEEE/UCS/SEMI International Symposium on
Conference_Location
Austin, TX
Print_ISBN
0-7803-2928-7
Type
conf
DOI
10.1109/ISSM.1995.524384
Filename
524384
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