DocumentCode

3352927

Title

Laser-induced Back-ablation Of Aluminum Thin Films Using Ultrashort Laser Pulses

Author

Bullock, A.B. ; Bolton, Paul R. ; Walling, R.S. ; Mayer, F.J.

Author_Institution

Physics and Space Technology, Lawrence Livermore National Laboratory

Volume

11

fYear

1997

fDate

18-23 May 1997

Firstpage

98

Lastpage

99

Keywords

Aluminum; Gas lasers; Glass; Laser ablation; Laser theory; Optical pulses; Probes; Pulsed laser deposition; Substrates; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on

Conference_Location

Baltimore, MD, USA

Print_ISBN

0-7803-4125-2

Type

conf

DOI

10.1109/CLEO.1997.602298

Filename

602298