DocumentCode
3352967
Title
A high level treatment of fluorine wastewater to reduce sludge
Author
Toyoda, Arata ; Taira, Tsutomu
Author_Institution
Ecology-Based Syst. Res. Labs., NEC Corp., Kawasaki, Japan
fYear
1995
fDate
17-19 Sep 1995
Firstpage
201
Lastpage
204
Abstract
A novel technique for treating fluorine wastewater has been developed in order to reduce sludge. This technique utilizes the dependence of solubility and adsorption characteristics of Al(OH)3 gel on pH, and uses Al(OH)3 gel itself repeatedly as a fluorine adsorbent. The reclamation process of Al(OH)3 gel involves varying the pH level of its slurry to allow Al(OH)3 gel to desorb fluorine and be dissolved as an aluminate ion. This technique can treat fluorine wastewater to several ppm at low-cost, and reduce the resulting volume of sludge to a level one-thirtieth the amount produced by the conventional treatment method
Keywords
adsorption; electronics industry; environmental factors; pH; solubility; water treatment; Al(OH)3; adsorption characteristics; fluorine adsorbent; fluorine wastewater; gel; pH level; reclamation process; sludge reduction; solubility; treatment method; wastewater treatment; Aluminum; Artificial intelligence; Semiconductor device manufacture; Sludge treatment; Slurries; Wastewater treatment; Water;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 1995., IEEE/UCS/SEMI International Symposium on
Conference_Location
Austin, TX
Print_ISBN
0-7803-2928-7
Type
conf
DOI
10.1109/ISSM.1995.524391
Filename
524391
Link To Document