Title :
GaAs On Si By Low Temperature Laser Chemical Vapor Deposition
Author :
Ku, J.K. ; Choi, W.L. ; In, B.W. ; Chung, J.W. ; Kwon, O.D.
Author_Institution :
Pohang Institute of Science and Technology
Keywords :
Chemical lasers; Chemical technology; Chemical vapor deposition; Electrons; Gallium arsenide; Laser theory; Semiconductor films; Temperature; X-ray lasers; X-ray scattering;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
Print_ISBN :
0-87942-550-4
DOI :
10.1109/LEOS.1990.690671