• DocumentCode
    3353081
  • Title

    Direct writing of conductive aluminum line on aluminum nitride ceramics with TEA CO2 laser

  • Author

    Yabe, H. ; Takahashi, Asami ; Obara, M.

  • Author_Institution
    Department of Electrical Engineering, Faculty of Science and Technology, Keio University
  • Volume
    11
  • fYear
    1997
  • fDate
    18-23 May 1997
  • Firstpage
    99
  • Lastpage
    99
  • Keywords
    Aluminum nitride; Artificial intelligence; Ceramics; Electric resistance; Laser beams; Laser modes; Laser theory; Optical pulses; Thermal conductivity; Writing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
  • Conference_Location
    Baltimore, MD, USA
  • Print_ISBN
    0-7803-4125-2
  • Type

    conf

  • DOI
    10.1109/CLEO.1997.602299
  • Filename
    602299
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3353081