Title :
Application of phase-grating beamsplitter to laser-processing indiumtin-oxide film for liquid crystal panel
Author :
Amako, J. ; Murai, Masakatsu ; Sonehara, Takeo
Author_Institution :
Corporate R & D, Seiko Epson Corporation
Keywords :
Artificial intelligence; Electric resistance; Electrical resistance measurement; Electrodes; Gratings; Laser beams; Liquid crystal displays; Optical pulses; Phased arrays; Thickness measurement;
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-4125-2
DOI :
10.1109/CLEO.1997.602300