Title :
Evaluation for fab performance using CPO
Author :
Ito, Yukiko ; Ogawa, Hajime ; Tani, Hiromichi
Author_Institution :
Electron. Devices Group, Fujitsu Ltd., Kawasaki, Japan
Abstract :
Tries to evaluate the investment effect ofthe whole factory by grasping the process cost precisely, classifying its structure, and identifying useless cost factors. As an evaluation index, we defined and used the CPO (Cost of Process Ownership), which is the cost per wafer in each process step based on the configuration of equipment installed in the factory and the configuration of product types manufactured there. This index was developed by making some improvements to the CEO (Cost of Equipment Ownership) model. We will report the definition ofthe CPO we are using and some examples of CPO utilization
Keywords :
economics; factory automation; integrated circuit manufacture; investment; production control; semiconductor process modelling; CEO; CPO; cost factors; cost of equipment ownership; cost of process ownership; evaluation index; fab performance; factory; investment; process cost; product types; Costs; Electric breakdown; Investments; Manufacturing processes; Production facilities; Semiconductor device breakdown; Semiconductor device manufacture; Semiconductor device modeling; Throughput; Virtual manufacturing;
Conference_Titel :
Semiconductor Manufacturing, 1995., IEEE/UCS/SEMI International Symposium on
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-2928-7
DOI :
10.1109/ISSM.1995.524409
