مرکز منطقه ای اطلاع رساني علوم و فناوري - Through-UHV-Pump Impurity Back Diffusion Under Large Gas Flow and Its Minimization

DocumentCode :

3353298

Title :

Through-UHV-Pump Impurity Back Diffusion Under Large Gas Flow and Its Minimization

Author :

Shihata, T. ; Ino, K. ; Konishi, N. ; Ohmi, T. ; Urano, C. ; Enosawa, H.

fYear :

1995

fDate :

17-19 Sep 1995

Firstpage :

288

Keywords :

Fluid flow; Fluid flow measurement; Gases; Impurities; Needles; Pressure measurement; Throughput; Vacuum systems; Valves; Velocity measurement;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Semiconductor Manufacturing, 1995., IEEE/UCS/SEMI International Symposium on

Print_ISBN :

0-7803-2928-7

Type :

conf

DOI :

10.1109/ISSM.1995.524412

Filename :

524412

Link To Document :