DocumentCode
3353356
Title
Deep UV laser-assisted cryo-etching of GaN
Author
Chih, M.C. ; Chen, B.C. ; Tsai, C.H. ; Huang, D.W. ; Li, J.H. ; Chiang, H.J. ; Chuang, T.J. ; Yang, C.C. ; Huang, C.N. ; Chen, C.Y. ; Hong, J.M.
Author_Institution
Institute of Electro-Optical Engineering, National Taiwan University
Volume
11
fYear
1997
fDate
18-23 May 1997
Firstpage
100
Lastpage
100
Keywords
Anisotropic magnetoresistance; Gallium nitride; Gas lasers; Gases; Gratings; Heat sinks; Laser beams; Optical films; Optimized production technology; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
Conference_Location
Baltimore, MD, USA
Print_ISBN
0-7803-4125-2
Type
conf
DOI
10.1109/CLEO.1997.602301
Filename
602301
Link To Document