Title :
Application of the digital holographic interference microscope for thin films investigation
Author :
Tishko, D.N. ; Tishko, T.V. ; Titar, V.P. ; Zadneprovskiy, Yu.A. ; Kuprin, A.S. ; Zgoda, I.V.
Author_Institution :
Karazin V.N. Kharkov Nat. Univ., Kharkov
Abstract :
We used the digital holographic interference microscope (DHIM) for thin films investigation. Three-dimensional (3-D) image of A1N thin film deposited on an acryl substrate by vacuum-arc method .and the results of the film thickness measurement are presented. It has been shown that the DHIM can be successfully used for film surface quality control, thickness and film damages parameters measurement.
Keywords :
III-V semiconductors; aluminium compounds; holography; optical microscopy; semiconductor thin films; wide band gap semiconductors; acryl substrate; digital holographic interference microscope; film damages parameters; film surface quality control; film thickness; thin films investigation; vacuum-arc method; Coatings; Holographic optical components; Holography; Interference; Optical films; Optical microscopy; Production; Substrates; Thickness measurement; Transistors;
Conference_Titel :
Optoelectronic Physics and Technology, 2007. OPT '07. International Workshop on
Conference_Location :
Kharkov
Print_ISBN :
1-4244-1322-2
Electronic_ISBN :
1-4244-1322-2
DOI :
10.1109/OPT.2007.4298545
