Design and Implementation of an Intelligent Manufacturing Execution System for Semiconductor Manufacturing Industry

Author

Chen, Ruey-Shun ; Tsai, Yung-Shun ; Chang, Chan-Chine

Author_Institution

Inst. of Inf. Manage., Nat. Chiao Tung Univ.

Volume

4

fYear

2006

fDate

9-13 July 2006

Firstpage

2948

Lastpage

2953

Abstract

This paper proposed an intelligent MES by integrating manufacturing execution system, data warehouse, online analytical processing and data mining system. The data warehouse for this system is provided by the massive amounts of data gathered from a MES. Through some process of integrating MES with data warehouses, data warehouses with decision analysis, and decision analysis with data mining systems. A three-tiered Web-based systematic framework has been established. The result of this study is the integration of the MES and data mining system. According to experimental analysis, the product yield and the manufacturing cycle time all have been improved for manufacturing industry

Keywords

Internet; data mining; data warehouses; intelligent manufacturing systems; manufacturing industries; production engineering computing; semiconductor device manufacture; data mining system; data mining systems; data warehouse; decision analysis; intelligent MES; intelligent manufacturing execution system; online analytical processing; semiconductor manufacturing industry; three-tiered Web-based systematic framework; Data analysis; Data mining; Data warehouses; Information analysis; Information management; Intelligent manufacturing systems; Manufacturing industries; Manufacturing processes; Pulp manufacturing; Semiconductor device manufacture; Data mining; Data warehouse; Decision tree; Manufacturing execution system (MES);

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial Electronics, 2006 IEEE International Symposium on

Conference_Location

Montreal, Que.

Print_ISBN

1-4244-0496-7

Electronic_ISBN

1-4244-0497-5

Type

conf

DOI

10.1109/ISIE.2006.296085

Filename

4078861