DocumentCode

3354267

Title

Ammonium Fluoride Anti-stiction Treatments For Polysilicon Microstructures

Author

Houston, M.R. ; Maboudian, Roya ; Howe, Roger T.

Author_Institution

University of California at Berkeley

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

210

Lastpage

213

Keywords

Etching; Hafnium; Microstructure; Oxidation; Rough surfaces; Silicon; Surface contamination; Surface morphology; Surface roughness; Surface treatment;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717143

Filename

717143