Title :
Ammonium Fluoride Anti-stiction Treatments For Polysilicon Microstructures
Author :
Houston, M.R. ; Maboudian, Roya ; Howe, Roger T.
Author_Institution :
University of California at Berkeley
Keywords :
Etching; Hafnium; Microstructure; Oxidation; Rough surfaces; Silicon; Surface contamination; Surface morphology; Surface roughness; Surface treatment;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717143
