DocumentCode

3354301

Title

Differential Adhesion Method For Microstructure Release: An Alternative To The Sacrificial Layer

Author

Smela, Elisabeth ; Ingands, O. ; Lundström, Ingemar

Author_Institution

Linkoping University

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

218

Lastpage

219

Keywords

Actuators; Adhesives; Chromium; Etching; Gold; Micromachining; Microstructure; Polymers; Silicon; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717146

Filename

717146