Title :
Differential Adhesion Method For Microstructure Release: An Alternative To The Sacrificial Layer
Author :
Smela, Elisabeth ; Ingands, O. ; Lundström, Ingemar
Author_Institution :
Linkoping University
Keywords :
Actuators; Adhesives; Chromium; Etching; Gold; Micromachining; Microstructure; Polymers; Silicon; Substrates;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717146
