Title :
Modeling and experimental results for an RTP light-pipe radiation thermometer calibration testbed
Author :
Ball, Kenneth S. ; Howell, John R.
Author_Institution :
Dept. of Mech. Eng., Virginia Polytech. Inst. & State Univ., Blacksburg, VA
Abstract :
A thermometry testbed designed for the testing, analysis, and calibration of light pipe thermometers and thermocouple-instrumented silicon wafers used in RTP tools has been constructed, and comparison of measured wafer temperature distributions on the instrumented wafers with light-pipe radiation thermometer measurements have been carried out. The test chamber has been modeled using detailed Monte Carlo simulation including measured specular/diffuse surface properties, and predictions of the model have been compared with measured results and are presented. The chamber is presently being modified to test advanced temperature measurement techniques, which are also described
Keywords :
Monte Carlo methods; calibration; elemental semiconductors; rapid thermal processing; semiconductor process modelling; silicon; thermocouples; thermometers; Monte Carlo simulation; RTP light-pipe radiation thermometer calibration testbed; Si; surface properties; thermocouple-instrumented silicon wafers; Calibration; Mechanical engineering; Mechanical variables measurement; Monte Carlo methods; Predictive models; Reflectivity; Semiconductor device modeling; Silicon; Temperature measurement; Testing;
Conference_Titel :
Advanced Thermal Processing of Semiconductors, 2004. RTP 2004. 12th IEEE International Conference on
Conference_Location :
Portland, OR
Print_ISBN :
0-7803-8477-6
DOI :
10.1109/RTP.2004.1441961
