DocumentCode
3354866
Title
Diode Laser Spectroscopy For Plasma Processing Diagnostics
Author
Sun, H.C. ; Whittaker, E.A.
Author_Institution
Stevens Institute of Technology
fYear
1990
fDate
4-9 Nov 1990
Firstpage
577
Lastpage
578
Keywords
Absorption; Diode lasers; Frequency modulation; Optical sensors; Plasma applications; Plasma diagnostics; Plasma materials processing; Spectroscopy; Sulfur hexafluoride; Sun;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
Print_ISBN
0-87942-550-4
Type
conf
DOI
10.1109/LEOS.1990.690683
Filename
690683
Link To Document