Title :
Effect of curvature on dynamic behavior of cantilever MEMS
Author :
Chatrathi, Kiran ; Packirisamy, Muthukumaran ; Stiharu, Ion ; Nerguizian, Vahé
Author_Institution :
Dept. of Mech. & Ind. Eng., Concordia Univ., Montreal, Que.
Abstract :
A study on the effect of curvature of cantilever MEMS is presented. A 3-D model is developed in ANSYS, the model presents the dynamic behavior of cantilever MEMS. Different types of geometrically configured cantilever MEMS are analyzed. The results include the variation of fundamental frequency and other higher natural frequencies with respect to curvature of cantilevers
Keywords :
cantilevers; micromechanical devices; ANSYS; cantilever MEMS; curvature; dynamic behavior; Atomic force microscopy; Finite element methods; Force sensors; Frequency; Industrial engineering; Micromechanical devices; Modal analysis; Parametric statistics; Shape; Solid modeling;
Conference_Titel :
Industrial Electronics, 2006 IEEE International Symposium on
Conference_Location :
Montreal, Que.
Print_ISBN :
1-4244-0496-7
Electronic_ISBN :
1-4244-0497-5
DOI :
10.1109/ISIE.2006.296012
