• DocumentCode
    3354872
  • Title

    Effect of curvature on dynamic behavior of cantilever MEMS

  • Author

    Chatrathi, Kiran ; Packirisamy, Muthukumaran ; Stiharu, Ion ; Nerguizian, Vahé

  • Author_Institution
    Dept. of Mech. & Ind. Eng., Concordia Univ., Montreal, Que.
  • Volume
    4
  • fYear
    2006
  • fDate
    9-13 July 2006
  • Firstpage
    3397
  • Lastpage
    3399
  • Abstract
    A study on the effect of curvature of cantilever MEMS is presented. A 3-D model is developed in ANSYS, the model presents the dynamic behavior of cantilever MEMS. Different types of geometrically configured cantilever MEMS are analyzed. The results include the variation of fundamental frequency and other higher natural frequencies with respect to curvature of cantilevers
  • Keywords
    cantilevers; micromechanical devices; ANSYS; cantilever MEMS; curvature; dynamic behavior; Atomic force microscopy; Finite element methods; Force sensors; Frequency; Industrial engineering; Micromechanical devices; Modal analysis; Parametric statistics; Shape; Solid modeling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Industrial Electronics, 2006 IEEE International Symposium on
  • Conference_Location
    Montreal, Que.
  • Print_ISBN
    1-4244-0496-7
  • Electronic_ISBN
    1-4244-0497-5
  • Type

    conf

  • DOI
    10.1109/ISIE.2006.296012
  • Filename
    4078940
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3354872