DocumentCode

3354932

Title

An Electrostatically Operated Torsion Mirror For Optical Switching Device

Author

Toshiyoshi, Hiroshi ; Fujita, Hiroyuki

Author_Institution

The University of Tokyo

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

297

Lastpage

300

Keywords

Electrostatics; Lenses; Mirrors; Optical attenuators; Optical beams; Optical devices; Optical fibers; Optical sensors; Optical switches; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717177

Filename

717177