• DocumentCode
    335535
  • Title

    Nondestructive high resolution resistivity topography of Semi-insulating GaAs and InP wafers

  • Author

    Jantz, W. ; Stibal, R. ; Windscheif, J. ; Mosel, F. ; Müller, G.

  • Author_Institution
    Universitat Erlangen
  • fYear
    1992
  • fDate
    21-24 Apr 1992
  • Firstpage
    171
  • Lastpage
    176
  • Keywords
    Annealing; Capacitors; Conductivity; Dielectric loss measurement; Dielectric measurements; Electrodes; Equivalent circuits; Gallium arsenide; Indium phosphide; Surfaces;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
  • Print_ISBN
    0-7503-0242-9
  • Type

    conf

  • DOI
    10.1109/SIM.1992.752695
  • Filename
    752695
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=335535