Title :
Nondestructive high resolution resistivity topography of Semi-insulating GaAs and InP wafers
Author :
Jantz, W. ; Stibal, R. ; Windscheif, J. ; Mosel, F. ; Müller, G.
Author_Institution :
Universitat Erlangen
Keywords :
Annealing; Capacitors; Conductivity; Dielectric loss measurement; Dielectric measurements; Electrodes; Equivalent circuits; Gallium arsenide; Indium phosphide; Surfaces;
Conference_Titel :
Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
Print_ISBN :
0-7503-0242-9
DOI :
10.1109/SIM.1992.752695