DocumentCode
3355599
Title
Solving Problems In Semiconductor Technology Using Optical Characterization Techniques
Author
Simard-Normandin, Martine
Author_Institution
Northern Telecom Electronics Limited
fYear
1990
fDate
4-9 Nov 1990
Firstpage
584
Lastpage
587
Keywords
Contamination; Microelectronics; Optical microscopy; Optical modulation; Particle beam optics; Raman scattering; Silicon on insulator technology; Spectroscopy; Tin; Vibration measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
Print_ISBN
0-87942-550-4
Type
conf
DOI
10.1109/LEOS.1990.690687
Filename
690687
Link To Document